TY - JOUR
T1 - At-line X-ray fluorescence metrology of metals and ultra-thin barrier layers for ULSI applications
AU - Shacham-Diamand, Yosi
AU - Yokhin, Boris
AU - Mazor, Itzhak
AU - Kepten, Avishai
AU - Shaviv, Roey
AU - Gabai, Ayelet
PY - 1998
Y1 - 1998
N2 - X-ray based metrology and inspection can be used for various applications: composition analysis, thin-film thickness measurement, and the determination of crystallographic structure and surface roughness. High resolution imaging is also theoretically possible for defects detection and analysis. In this work we focus on X-ray Fluorescence (XRF). We discuss its principles, the system requirements, and its applications for X-ray metrology. Such systems can be installed in an in-line or at-line configuration for the monitoring of interconnects systems, both aluminum and copper based. The measurement can be done over special test sites on the chip itself or on the scribe-lanes. Measurement over active devices is also possible but electron-hole creation in the gate and field oxide limits the maximum allowed irradiation per unit area. In this work we discuss the guidelines for critical dose and minimum measured area that allow proper and fast metrology. It is concluded that both high-speed and damage free XRF metrology is possible.
AB - X-ray based metrology and inspection can be used for various applications: composition analysis, thin-film thickness measurement, and the determination of crystallographic structure and surface roughness. High resolution imaging is also theoretically possible for defects detection and analysis. In this work we focus on X-ray Fluorescence (XRF). We discuss its principles, the system requirements, and its applications for X-ray metrology. Such systems can be installed in an in-line or at-line configuration for the monitoring of interconnects systems, both aluminum and copper based. The measurement can be done over special test sites on the chip itself or on the scribe-lanes. Measurement over active devices is also possible but electron-hole creation in the gate and field oxide limits the maximum allowed irradiation per unit area. In this work we discuss the guidelines for critical dose and minimum measured area that allow proper and fast metrology. It is concluded that both high-speed and damage free XRF metrology is possible.
KW - Metrology
KW - ULSI
KW - X-ray fluorescence (XRF)
UR - http://www.scopus.com/inward/record.url?scp=0032405061&partnerID=8YFLogxK
U2 - 10.1117/12.324424
DO - 10.1117/12.324424
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AN - SCOPUS:0032405061
SN - 0277-786X
VL - 3509
SP - 88
EP - 94
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - In-Line Characterization Techniques fot Performance and Yield Enhancement in Microelectronic Manufacturing II
Y2 - 23 September 1998 through 24 September 1998
ER -