It is well known that atomic hydrogen can cause significant changes in surface conductivity of many semiconductors such as ZnO. It was found that some of the atomic hydrogen produced during the operation of ionization gages, ion pumps, and titanium sublimators can reach ZnO samples even when the samples have no line of sight to these devices. Conductivity changes of many orders of magnitude are produced when the residual-gas background contains sufficient amounts of hydrogen. This effect must be considered when surface conductivity measurements are being made on materials such as ZnO.
|Number of pages||3|
|Journal||Journal of Vacuum Science and Technology|
|State||Published - 1976|