Advanced materials for the 3D microbattery

D. Golodnitsky*, V. Yufit, M. Nathan, I. Shechtman, T. Ripenbein, E. Strauss, S. Menkin, E. Peled

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


Out recent achievements in the development of three-dimensional (3D) thin film microbatteries on silicon and on microchannel plates (MCP) are presented. In such 3D microbatteries, the battery sandwich-like structure, including electrodes, electrolyte and current collectors, is deposited conformally on all available surfaces, thereby utilizing the dead volume of the substrate. Thin-film molybdenum oxysulfide and iron sulfide cathodes were deposited galvanostatically. XRD, XPS and TOF-SIMS characterizations indicated that the submicron thick MoOySz films were amorphous, with the stoichiometry of the films varying with depth. Electrodeposited FeSx films have an amorphous, network-like porous structure with nanosize particles. A special flow cell for conformal coating of the perforated substrates was designed. A Li/hybrid polymer electrolyte (HPE)/MoOyS z-on-Si 3D half cell ran at id = ich = 10 μA cm-2 and room temperature for 100 charge/discharge cycles with 0.1%/cycle capacity loss and 100% Faradaic efficiency. A 3D half cell on MCP exhibited 20 times higher capacity than that of a planar half cell with the same footprint.

Original languageEnglish
Pages (from-to)281-287
Number of pages7
JournalJournal of Power Sources
Issue number2
StatePublished - 28 Feb 2006
EventSelected Papers Presented at the 2004 Meeting of the International Battery Materials Association -
Duration: 18 Apr 200422 Apr 2004


FundersFunder number
Government of Israel
University Authority for Applied Research and Industrial Development Ltd.
U.S. Air Force


    • Microbattery
    • Thin-film cathode


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