An analytic model of the selection of vacuum pumping technology is presented, which identifies selection issues directly contributing to or hindering the pumping system performance. These two groups of issues, entitled benefit and cost, respectively, are analyzed through a decision-making methodology called the analytic hierarchy process. Application of this methodology to the benefit and cost issues results in a priority structure leading to a systematic selection of the best choice out of a given set of candidate systems. Results of this evaluation are given for a test case of ultrahigh vacuum.
|Number of pages
|Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
|Published - 1 Jul 1987