TY - JOUR
T1 - A systematic approach for selecting pumping technology
T2 - Ultrahigh vacuum application
AU - shapira, Yoram
AU - Arbel, Ami
PY - 1987/7/1
Y1 - 1987/7/1
N2 - An analytic model of the selection of vacuum pumping technology is presented, which identifies selection issues directly contributing to or hindering the pumping system performance. These two groups of issues, entitled benefit and cost, respectively, are analyzed through a decision-making methodology called the analytic hierarchy process. Application of this methodology to the benefit and cost issues results in a priority structure leading to a systematic selection of the best choice out of a given set of candidate systems. Results of this evaluation are given for a test case of ultrahigh vacuum.
AB - An analytic model of the selection of vacuum pumping technology is presented, which identifies selection issues directly contributing to or hindering the pumping system performance. These two groups of issues, entitled benefit and cost, respectively, are analyzed through a decision-making methodology called the analytic hierarchy process. Application of this methodology to the benefit and cost issues results in a priority structure leading to a systematic selection of the best choice out of a given set of candidate systems. Results of this evaluation are given for a test case of ultrahigh vacuum.
UR - http://www.scopus.com/inward/record.url?scp=84955026318&partnerID=8YFLogxK
U2 - 10.1116/1.574414
DO - 10.1116/1.574414
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AN - SCOPUS:84955026318
SN - 0734-2101
VL - 5
SP - 2526
EP - 2529
JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
IS - 4
ER -