A systematic approach for selecting pumping technology: Ultrahigh vacuum application

Research output: Contribution to journalArticlepeer-review

Abstract

An analytic model of the selection of vacuum pumping technology is presented, which identifies selection issues directly contributing to or hindering the pumping system performance. These two groups of issues, entitled benefit and cost, respectively, are analyzed through a decision-making methodology called the analytic hierarchy process. Application of this methodology to the benefit and cost issues results in a priority structure leading to a systematic selection of the best choice out of a given set of candidate systems. Results of this evaluation are given for a test case of ultrahigh vacuum.

Original languageEnglish
Pages (from-to)2526-2529
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume5
Issue number4
DOIs
StatePublished - 1 Jul 1987

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