@inproceedings{724b58bba82e4b0881b8c10f84e8c7fc,
title = "A low-cost CMOS compatible serpentine-structured polysilicon-based microbolometer array",
abstract = "This work reports the design, fabrication and initial characterization of novel low-cost CMOS compatible microbolometers and a 16∗16 demonstration focal plane array based on the new technology. The bolometers are fabricated as part of a standard CMOS process with maskless postprocessing that includes frontside isotropic silicon dry etching in order to release the serpentine microstructures of the bolometers. FPA readout is based on differential current integration per column with an internal 5bit DAC for non-uniformity correction of each pixel. Fabricated devices are measured and compared with design and simulation.",
keywords = "Bolometers, CMOS process, Circuits, Dielectrics, Fabrication, Resistors, Sensor arrays, Silicon, Thermal resistance, Thermal sensors",
author = "E. Socher and Y. Sinai and Y. Nemirovsky",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215317",
language = "אנגלית",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "320--323",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "ארצות הברית",
}