TY - GEN
T1 - A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors
T2 - 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, IEEEI 2000
AU - Bochobza-Degani, O.
AU - Seter, D. J.
AU - Socher, E.
AU - Nemirovsky, Y.
N1 - Publisher Copyright:
© 2002 IEEE.
PY - 2000
Y1 - 2000
N2 - A new analytical approach for modeling the pull-in condition of voltage controlled electrostatic actuators (VCEA) with a general single degree of freedom (DOF) and general shape is presented. The presented approach gives a more general view of the pull-in condition in electrostatic actuators. The pull-in condition for an electrostatic actuator is defined in the voltage and degree of freedom plane. Then a general algebraic equation, referred to as the pull-in equation, is derived for the actuator. The solution of this equation directly yields the pull-in condition. Several case studies are then presented and their pull-in characteristics are summarized.
AB - A new analytical approach for modeling the pull-in condition of voltage controlled electrostatic actuators (VCEA) with a general single degree of freedom (DOF) and general shape is presented. The presented approach gives a more general view of the pull-in condition in electrostatic actuators. The pull-in condition for an electrostatic actuator is defined in the voltage and degree of freedom plane. Then a general algebraic equation, referred to as the pull-in equation, is derived for the actuator. The solution of this equation directly yields the pull-in condition. Several case studies are then presented and their pull-in characteristics are summarized.
UR - http://www.scopus.com/inward/record.url?scp=10944253276&partnerID=8YFLogxK
U2 - 10.1109/EEEI.2000.924457
DO - 10.1109/EEEI.2000.924457
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AN - SCOPUS:10944253276
T3 - 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings
SP - 425
EP - 428
BT - 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 11 April 2000 through 12 April 2000
ER -