A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors: Modeling and characterization

O. Bochobza-Degani; D. J. Seter; E. Socher; Y. Nemirovsky

doi:10.1109/EEEI.2000.924457

A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors: Modeling and characterization

O. Bochobza-Degani, D. J. Seter, E. Socher, Y. Nemirovsky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A new analytical approach for modeling the pull-in condition of voltage controlled electrostatic actuators (VCEA) with a general single degree of freedom (DOF) and general shape is presented. The presented approach gives a more general view of the pull-in condition in electrostatic actuators. The pull-in condition for an electrostatic actuator is defined in the voltage and degree of freedom plane. Then a general algebraic equation, referred to as the pull-in equation, is derived for the actuator. The solution of this equation directly yields the pull-in condition. Several case studies are then presented and their pull-in characteristics are summarized.

Original language	English
Title of host publication	21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	425-428
Number of pages	4
ISBN (Electronic)	0780358422, 9780780358423
DOIs	https://doi.org/10.1109/EEEI.2000.924457
State	Published - 2000
Externally published	Yes
Event	21st IEEE Convention of the Electrical and Electronic Engineers in Israel, IEEEI 2000 - Tel-Aviv, Israel Duration: 11 Apr 2000 → 12 Apr 2000

Publication series

Name	21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings

Conference

Conference	21st IEEE Convention of the Electrical and Electronic Engineers in Israel, IEEEI 2000
Country/Territory	Israel
City	Tel-Aviv
Period	11/04/00 → 12/04/00

Access to Document

10.1109/EEEI.2000.924457

Cite this

Bochobza-Degani, O., Seter, D. J., Socher, E., & Nemirovsky, Y. (2000). A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors: Modeling and characterization. In 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings (pp. 425-428). [924457] (21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EEEI.2000.924457

Bochobza-Degani, O. ; Seter, D. J. ; Socher, E. et al. / A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors : Modeling and characterization. 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2000. pp. 425-428 (21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings).

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abstract = "A new analytical approach for modeling the pull-in condition of voltage controlled electrostatic actuators (VCEA) with a general single degree of freedom (DOF) and general shape is presented. The presented approach gives a more general view of the pull-in condition in electrostatic actuators. The pull-in condition for an electrostatic actuator is defined in the voltage and degree of freedom plane. Then a general algebraic equation, referred to as the pull-in equation, is derived for the actuator. The solution of this equation directly yields the pull-in condition. Several case studies are then presented and their pull-in characteristics are summarized.",

author = "O. Bochobza-Degani and Seter, {D. J.} and E. Socher and Y. Nemirovsky",

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doi = "10.1109/EEEI.2000.924457",

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Bochobza-Degani, O, Seter, DJ, Socher, E & Nemirovsky, Y 2000, A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors: Modeling and characterization. in 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings., 924457, 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 425-428, 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, IEEEI 2000, Tel-Aviv, Israel, 11/04/00. https://doi.org/10.1109/EEEI.2000.924457

A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors : Modeling and characterization. / Bochobza-Degani, O.; Seter, D. J.; Socher, E. et al.

21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2000. p. 425-428 924457 (21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Bochobza-Degani O, Seter DJ, Socher E, Nemirovsky Y. A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors: Modeling and characterization. In 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2000. p. 425-428. 924457. (21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings). https://doi.org/10.1109/EEEI.2000.924457

A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors: Modeling and characterization

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