@inproceedings{0cfccef23bfa4b40ac32f1a0854f3ddf,
title = "A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors: Modeling and characterization",
abstract = "A new analytical approach for modeling the pull-in condition of voltage controlled electrostatic actuators (VCEA) with a general single degree of freedom (DOF) and general shape is presented. The presented approach gives a more general view of the pull-in condition in electrostatic actuators. The pull-in condition for an electrostatic actuator is defined in the voltage and degree of freedom plane. Then a general algebraic equation, referred to as the pull-in equation, is derived for the actuator. The solution of this equation directly yields the pull-in condition. Several case studies are then presented and their pull-in characteristics are summarized.",
author = "O. Bochobza-Degani and Seter, {D. J.} and E. Socher and Y. Nemirovsky",
note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; null ; Conference date: 11-04-2000 Through 12-04-2000",
year = "2000",
doi = "10.1109/EEEI.2000.924457",
language = "אנגלית",
series = "21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "425--428",
booktitle = "21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings",
address = "ארצות הברית",
}