A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors: Modeling and characterization

O. Bochobza-Degani, D. J. Seter, E. Socher, Y. Nemirovsky

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A new analytical approach for modeling the pull-in condition of voltage controlled electrostatic actuators (VCEA) with a general single degree of freedom (DOF) and general shape is presented. The presented approach gives a more general view of the pull-in condition in electrostatic actuators. The pull-in condition for an electrostatic actuator is defined in the voltage and degree of freedom plane. Then a general algebraic equation, referred to as the pull-in equation, is derived for the actuator. The solution of this equation directly yields the pull-in condition. Several case studies are then presented and their pull-in characteristics are summarized.

Original languageEnglish
Title of host publication21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages425-428
Number of pages4
ISBN (Electronic)0780358422, 9780780358423
DOIs
StatePublished - 2000
Externally publishedYes
Event21st IEEE Convention of the Electrical and Electronic Engineers in Israel, IEEEI 2000 - Tel-Aviv, Israel
Duration: 11 Apr 200012 Apr 2000

Publication series

Name21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings

Conference

Conference21st IEEE Convention of the Electrical and Electronic Engineers in Israel, IEEEI 2000
Country/TerritoryIsrael
CityTel-Aviv
Period11/04/0012/04/00

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