An analytic model for the selection of vacuum pumping technology is presented. The model identifies selection issues, which may be classified into two groups according to whether they directly contribute or are detrimental to the pumping system performance. These two groups of issues, entitled benefit and cost, respectively, are analyzed through a decision-making methodology called the analytic hierarchy process (AHP). Application of this methodology to the benefit and cost issues results in a priority structure leading to selection of the best choice from a given set of candidate systems. Results of this evaluation are given for a specific case of a vacuum evaporation system.
|Number of pages||7|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|State||Published - 1 Mar 1986|