3D Integrated Photonics based on Fast Sol-gel Technology and Soft Nano Imprint Lithography

Ofer Bar-On; Philipp Brenner; Raz Gvishi; Tobias Siegle; Heinz Kalt; Uli Lemmer; Jacob Scheuer

3D Integrated Photonics based on Fast Sol-gel Technology and Soft Nano Imprint Lithography

Ofer Bar-On^*, Philipp Brenner, Raz Gvishi, Tobias Siegle, Heinz Kalt, Uli Lemmer, Jacob Scheuer

^*Corresponding author for this work

School of Electrical Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

In this work we demonstrate 3D high quality sol-gel optical devices fabricated using Soft Nano Imprint Lithography. Passive, active (lasers), and multi-layer designs are demonstrated and characterized exhibiting excellent optical performance.

Original language	English
Article number	NoTh1C.5
Journal	Optics InfoBase Conference Papers
State	Published - 2017
Event	Novel Optical Materials and Applications, NOMA 2017 - New Orleans, United States Duration: 24 Jul 2017 → 27 Jul 2017

Cite this

@article{87e59081f07944f9abad2b520711ce1c,

title = "3D Integrated Photonics based on Fast Sol-gel Technology and Soft Nano Imprint Lithography",

abstract = "In this work we demonstrate 3D high quality sol-gel optical devices fabricated using Soft Nano Imprint Lithography. Passive, active (lasers), and multi-layer designs are demonstrated and characterized exhibiting excellent optical performance.",

author = "Ofer Bar-On and Philipp Brenner and Raz Gvishi and Tobias Siegle and Heinz Kalt and Uli Lemmer and Jacob Scheuer",

note = "Publisher Copyright: {\textcopyright} OSA 2017.; Novel Optical Materials and Applications, NOMA 2017 ; Conference date: 24-07-2017 Through 27-07-2017",

year = "2017",

language = "אנגלית",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

}

TY - JOUR

T1 - 3D Integrated Photonics based on Fast Sol-gel Technology and Soft Nano Imprint Lithography

AU - Bar-On, Ofer

AU - Brenner, Philipp

AU - Gvishi, Raz

AU - Siegle, Tobias

AU - Kalt, Heinz

AU - Lemmer, Uli

AU - Scheuer, Jacob

PY - 2017

Y1 - 2017

N2 - In this work we demonstrate 3D high quality sol-gel optical devices fabricated using Soft Nano Imprint Lithography. Passive, active (lasers), and multi-layer designs are demonstrated and characterized exhibiting excellent optical performance.

AB - In this work we demonstrate 3D high quality sol-gel optical devices fabricated using Soft Nano Imprint Lithography. Passive, active (lasers), and multi-layer designs are demonstrated and characterized exhibiting excellent optical performance.

UR - http://www.scopus.com/inward/record.url?scp=85136353741&partnerID=8YFLogxK

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.conferencearticle???

AN - SCOPUS:85136353741

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

M1 - NoTh1C.5

T2 - Novel Optical Materials and Applications, NOMA 2017

Y2 - 24 July 2017 through 27 July 2017

ER -

3D Integrated Photonics based on Fast Sol-gel Technology and Soft Nano Imprint Lithography

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