3D integrated photonics based on fast sol-gel technology and soft nano imprint lithography

Ofer Bar-On; Philipp Brenner; Raz Gvishi; Tobias Siegle; Heinz Kalt; Uli Lemmer; Jacob Scheuer

doi:10.1364/NOMA.2017.NoTh1C.5

3D integrated photonics based on fast sol-gel technology and soft nano imprint lithography

Ofer Bar-On^*, Philipp Brenner, Raz Gvishi, Tobias Siegle, Heinz Kalt, Uli Lemmer, Jacob Scheuer

^*Corresponding author for this work

School of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

In this work we demonstrate 3D high quality sol-gel optical devices fabricated using Soft Nano Imprint Lithography. Passive, active (lasers), and multi-layer designs are demonstrated and characterized exhibiting excellent optical performance.

Original language	English
Title of host publication	Advanced Photonics, NOMA 2017
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580309
DOIs	https://doi.org/10.1364/NOMA.2017.NoTh1C.5
State	Published - 2017
Event	Advanced Photonics, NOMA 2017 - New Orleans, United States Duration: 24 Jul 2017 → 27 Jul 2017

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F55-NOMA 2017
ISSN (Electronic)	2162-2701

Conference

Conference	Advanced Photonics, NOMA 2017
Country/Territory	United States
City	New Orleans
Period	24/07/17 → 27/07/17

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10.1364/NOMA.2017.NoTh1C.5

Cite this

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title = "3D integrated photonics based on fast sol-gel technology and soft nano imprint lithography",

abstract = "In this work we demonstrate 3D high quality sol-gel optical devices fabricated using Soft Nano Imprint Lithography. Passive, active (lasers), and multi-layer designs are demonstrated and characterized exhibiting excellent optical performance.",

author = "Ofer Bar-On and Philipp Brenner and Raz Gvishi and Tobias Siegle and Heinz Kalt and Uli Lemmer and Jacob Scheuer",

year = "2017",

doi = "10.1364/NOMA.2017.NoTh1C.5",

language = "אנגלית",

isbn = "9781943580309",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Advanced Photonics, NOMA 2017",

note = "Advanced Photonics, NOMA 2017 ; Conference date: 24-07-2017 Through 27-07-2017",

}

Bar-On, O, Brenner, P, Gvishi, R, Siegle, T, Kalt, H, Lemmer, U & Scheuer, J 2017, 3D integrated photonics based on fast sol-gel technology and soft nano imprint lithography. in Advanced Photonics, NOMA 2017. Optics InfoBase Conference Papers, vol. Part F55-NOMA 2017, Optica Publishing Group (formerly OSA), Advanced Photonics, NOMA 2017, New Orleans, United States, 24/07/17. https://doi.org/10.1364/NOMA.2017.NoTh1C.5

3D integrated photonics based on fast sol-gel technology and soft nano imprint lithography. / Bar-On, Ofer; Brenner, Philipp; Gvishi, Raz et al.
Advanced Photonics, NOMA 2017. Optica Publishing Group (formerly OSA), 2017. (Optics InfoBase Conference Papers; Vol. Part F55-NOMA 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Kalt, Heinz

AU - Lemmer, Uli

AU - Scheuer, Jacob

PY - 2017

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Y2 - 24 July 2017 through 27 July 2017

ER -

3D integrated photonics based on fast sol-gel technology and soft nano imprint lithography

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