2. An uhv system for in situ preparation and analysis of thin films and surfaces

Y. Shapira, E. Grünbaum

Research output: Contribution to journalArticlepeer-review

Abstract

A versatile uhv system was designed in order to enable the preparation of thin films of different materials and their analysis to be undertaken. It includes various sources for evaporation: a high-power electron gun, conventional crucibles and Knudsen cells. An airlock is available for fast transfer of prepared films and new substrates. By a special sample holder the thin films can be manipulated to different positions for structural analysis by reflection high energy electron diffraction (RHEED), and for chemical analysis by Auger electron spectroscopy (AES) and secondary ion mass spectrometry (SIMS).

Original languageEnglish
Pages (from-to)523-526
Number of pages4
JournalVacuum
Volume28
Issue number12
DOIs
StatePublished - Dec 1978

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