Keyphrases
Vacuum Arc
100%
Macroparticles
39%
Vacuum Arc Plasma
39%
Refractory Anode
35%
Cathode Spot
34%
Arc Current
33%
Filtered Vacuum Arc Deposition
25%
Ion Current
23%
Deposition Rate
22%
Magnetic Field
22%
Vacuum Arc Deposition
21%
Plasma Beam
20%
Plasma Jet
19%
Multi-cathode
18%
Filtered Vacuum Arc
17%
Depositional System
17%
High-current Vacuum Arc
13%
Axial Magnetic Field
13%
Annealing
12%
Arc Plasma Sources
11%
Plasma Plume
11%
Film Deposition
11%
Anode Temperature
11%
Plasma Flow
10%
Current Distribution
10%
Transverse Current
10%
Torus
10%
Cathode Surface
9%
Glass Substrate
9%
Plasma Density
9%
Inter-electrode
8%
Current Injection
8%
Steady State
8%
Electrode Configuration
8%
Air Arc
8%
Cathode Material
8%
Arc Plasma Jet
8%
Pulsed Arc
8%
Black Men
8%
Electric Field (E-field)
8%
Plasma Sources
8%
Plasma Flux
8%
Water Cooling
7%
Cathodic Arc
7%
Cu Cathode
7%
Electrode Gap
7%
Electron Temperature
7%
Background Gas
7%
Room Temperature
7%
Submerged Arc
7%
Engineering
Cathode Spot
40%
Magnetic Field
38%
Arc Plasma
37%
Macroparticles
30%
Thin Films
28%
Duct
27%
Deposition Rate
25%
Plasma Source
18%
Deposition System
15%
Deposited Film
15%
Plasma Plume
12%
Anode Surface
12%
Energy Engineering
10%
Current Distribution
10%
Cathode Surface
10%
Electron Temperature
9%
Transmissions
9%
Pulsed Arc
9%
Cathodic Arc
9%
Glass Substrate
9%
Mm Diameter
9%
Plasma Density
9%
Heat Flux
8%
Ray Diffraction
8%
Interelectrode Gap
7%
Room Temperature
7%
Temperature Distribution
7%
Refractive Index
6%
Electric Field
6%
Current Injection
6%
Excited State
6%
Current Flow
6%
Thermocouple
6%
Arc Voltage
6%
Ray Photoelectron Spectroscopy
6%
Coating Thickness
6%
Gas Pressure
5%
Oxide Film
5%
Magnetic Field Strength
5%
Applied Voltage
5%
Material Science
Anode
82%
Cathode
72%
Film
44%
Thin Films
22%
Density
13%
Film Deposition
10%
ZnO
9%
Amorphous Material
8%
Scanning Electron Microscopy
7%
Annealing
7%
X-Ray Diffraction
7%
Electrical Resistivity
6%
Optical Property
6%
Mechanical Strength
5%
Tin Oxide
5%
Microhardness
5%
Oxide Film
5%