VST E-Beam Evaporator (GloveBox)

Physical Vapor Deposition VST TFDS-870

Capable of heating materials to high temperature, high purity film, very high deposition rates, and evaporation of high-temperature materials and refractory metals. Can evaporate high melting point materials.

Materials: Au, Ag, Co, Cr, Cu, In, Nb, Ni, Mo, Pd, Pt, Sn, Ta, Ti, W, Fe, CF2, MgF.

Specification:
Up to 4‘’ wafers.
Rotating sample holder.
Typical deposition rate: 0.5 Å/sec.
Nitrogen environment to avoid oxidation.
Full wafer deposition

​Location:
Glove box lab, Nano center building.