VST E-Beam Evaporator (GloveBox)

  • Sergio Bloch (Manager)

Equipment/facility: Equipment

    Equipments Details


    Physical Vapor Deposition VST TFDS-870

    Capable of heating materials to high temperature, high purity film, very high deposition rates, and evaporation of high-temperature materials and refractory metals. Can evaporate high melting point materials.

    Materials: Au, Ag, Co, Cr, Cu, In, Nb, Ni, Mo, Pd, Pt, Sn, Ta, Ti, W, Fe, CF2, MgF.

    Up to 4‘’ wafers.
    Rotating sample holder.
    Typical deposition rate: 0.5 Å/sec.
    Nitrogen environment to avoid oxidation.
    Full wafer deposition

    Glove box lab, Nano center building.


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