Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

Manufacturer and model:
Physical Electronics USA, Model TRIFT97.

Description:
TOF-SIMS provides surface microanalysis of organic and inorganic materials by detection of secondary ions of atoms and molecules. Three modes of operation are possible: surface mass spectrometry; chemical imaging; depth profiling.

Specification:
Ion sources: Ga+, Cs+, O2+.
Detection limit: ppm-ppb.
Spatial resolution at imaging: >100 nm.
Probing depth: 1-3 monolayers in static mode.
Depth resolution: 0.5 nm with 500eV sputter gun.
Mass range: 0 - 10.000 amu.
Detectable elements: H – U, molecular species.

Location:
Multidisciplinary Research Building, Room #004.