Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

  • Alexander Gladkich (Manager)

Equipment/facility: Equipment

    Equipments Details


    Manufacturer and model:
    Physical Electronics USA, Model TRIFT97.

    TOF-SIMS provides surface microanalysis of organic and inorganic materials by detection of secondary ions of atoms and molecules. Three modes of operation are possible: surface mass spectrometry; chemical imaging; depth profiling.

    Ion sources: Ga+, Cs+, O2+.
    Detection limit: ppm-ppb.
    Spatial resolution at imaging: >100 nm.
    Probing depth: 1-3 monolayers in static mode.
    Depth resolution: 0.5 nm with 500eV sputter gun.
    Mass range: 0 - 10.000 amu.
    Detectable elements: H – U, molecular species.

    Multidisciplinary Research Building, Room #004.


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