Profilometer KLA

  • Erez Benjamin (Manager)University Center for Nanoscience and Nanotechnology, Tel Aviv University

Equipment/facility: Equipment

    Equipments Details


    Manufacturer and model:
    The KLA-Tencor P-6 Stylus Profiles.

    Stylus profilometer for measurements of surface roughness, film thickness and wafer stress analysis.

    Common applications:
    Photoresist thickness, deposited material thickness, etch depth, surface roughness, etc.

    2D surface topography measurements.
    Step height: Nanometers to 1000µm.
    Low force with constant force control: 0.5 to 50mg.
    The scan full diameter of the sample without stitching.
    Radius tip of 2 microns.
    Motorized stage up to 150mm.
    Vacuum holder.

    Engineering Cleanroom, Wolfson building of Electrical Engineering.


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