Equipments Details
Description
Manufacturer and model:
Veeco Dektak 6M Surface Profiler.
Description:
The Dektak 6M is a contact profilometer used for surface topography, waviness and roughness measurements. This tool can measure step height of thin films (~500Å to 100um), by a diamond-tip stylus that contacts the sample.
Specification:
Vertical Range: ~500Å - 100um.
Stylus: Diamond tip, 12.5μm radius.
Stylus Tracking Force: 1mg – 15mg (software selectable).
Sample Stage Size: up to 6” (150 mm) wafers.
Max Sample thickness: 31.75 mm.
Max Sample weight: 680gr.
No liquids or uncured polymer, photoresist, or spin on films, are allowed.
Providing 2D and 3D mapping.
Location:
Clean Room, Nano center building.
Veeco Dektak 6M Surface Profiler.
Description:
The Dektak 6M is a contact profilometer used for surface topography, waviness and roughness measurements. This tool can measure step height of thin films (~500Å to 100um), by a diamond-tip stylus that contacts the sample.
Specification:
Vertical Range: ~500Å - 100um.
Stylus: Diamond tip, 12.5μm radius.
Stylus Tracking Force: 1mg – 15mg (software selectable).
Sample Stage Size: up to 6” (150 mm) wafers.
Max Sample thickness: 31.75 mm.
Max Sample weight: 680gr.
No liquids or uncured polymer, photoresist, or spin on films, are allowed.
Providing 2D and 3D mapping.
Location:
Clean Room, Nano center building.
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