Plasma Preen

  • Gidon Jacob (Manager)

Equipment/facility: Equipment

    Equipments Details


    Manufacturer and model:
    Plasmatic Systems, Inc. Plasma Preen II #973.

    Device and wafer surface cleaning treatments procedures, removal of organic residuals and native oxides.

    Water cooled reactor with 9’’ x 7’’ x 3’’ Reaction Chamber.
    Material: Pyrex & Aluminum.
    Gas Supply: Argon and Oxygen.
    60Hz power.
    Electrical Specifications: 120V, 60Hz.
    Maximum Temperature: 200°C.
    Temperature Range: 25° to 200°C.

    Engineering Cleanroom, Wolfson building of Electrical Engineering.


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