Etching

    Center for Nanoscience and Nanotechnology

    Equipment/facility: Facility

      Equipments Details

      Contact Information

      Equipment hierarchy

      Fabrication
      Etching
      Deep RIE SLR ICP
      Deep RIE Versaline DSE
      Diener Plasma (EBL CR)
      Ion Beam Milling AJA
      Plasma Preen
      RIE Nextral
      RIE Oerlicon