E-beam Evaporator Vinci

Manufacturer and model:
VINCI TECHNOLOGIES PVD 20.

Description:
Electron beam evaporation is available on a variety of platforms suitable for many applications, including metallization, dielectric coating and optical coating.

Materials:
Au, Ag, Al, Co, Cr, Cu, In, Nb, Ni, Mo, Pd, Pt, Sn, Ta, Ti, W, Al203.

Specification:
Up to 6‘’ wafers.
Load lock.
In situ Ar plasma preclean.
Base pressure E-8 Torr.
Heating up to 350˚C.
Typical deposition rate: 0.5 Å/sec.

​Location:
Engineering Cleanroom, Wolfson building of Electrical Engineering.